Bayani na samfurin:

Argon ion polishing tsarin ne wani tebur irin samfurin kayan aiki da aka yi amfani da shi ga samfurin sashi shirye-shirye da kuma jirgin sama polishing don samun samfurin a kan SEM da sauran kayan aiki. Ana da nau'ikan kayan da za a iya sarrafawa tare da IlionII don ƙwanƙwasawa, gami da samfuran da aka ƙunshi da abubuwa da yawa, da kuma kayan haɗin gwiwa, kayan semiconductor, polymers da ma'adanai tare da taurin inji daban-daban, girma da halayen jiki. SEM, EBSD samfurin daban-daban kayan kamar walda seam sashe, hadewa kewaye walda maki, multi-layers fim sashe, granules, fiber sashe, hadaddun kayan, yumbu, karfe da kuma gami, dutse ma'adinai da sauran inorganic non-karfe.

Main fasaha sigogi na samfurin:

1. Ion Gun: Biyu triangular gini (cathode, anode da mayar da hankali pole) Penning Ion Gun, mayar da hankali Ion beam zane, high yi ba tare da consumables

2. Polishing kusurwa: +10 ° zuwa -10 °, kowane ion gun za a iya daidaita kansa

3. Ion beam makamashi: 100 V zuwa 8.0 kV

4. Ion beam yawa: 10 mA / cm2 m

5. Polishing gudun: 300 μm / h (8.0 kV yanayin don silicon samfurin)

6. Samfurin Loading: Ilion Samfurin Blocker, Samfuri mai sauki, daidai sharfi matsayi sake, sake amfani, tare da Samfurin Stub za a iya juyawa kai tsaye zuwa SEM don lura

7. Samfurin juyawa: 0.5 zuwa 6 rpm ci gaba daidaitawa

8.Beam gyare-gyare: Ion beam gyare-gyare aiki, za a iya yi sector sashe polishing (sector kusurwa ne 10 zuwa 90 digiri daidaitawa) da kuma jirgin sama polishing

9. Samfurin Kulawa: Digital zoom microscope tare da PC da Digital Micrograph software don karɓar hoto, tare da hoto ajiya da kuma bincike ta hanyar Gatan Digital Micrograph software don yin hoto a ainihin lokacin (300x-2,200x)

10. Liquid nitrogen sanyaya tebur: Saita mai ruwa nitrogen sanyaya tebur, samfurin zui low zafin jiki iya zuwa -120 ° C, inganci rage lalacewar da ion beam ya haifar da samfurin

injin tsarin:

11. bushe famfo tsarin: biyu mataki membrane famfo goyon bayan 80 lita / second turbo kwayoyin famfo

12.Matsin lamba: 5x10-6 TOS tushen matsin lamba, 8.5x10-5 TOS aiki matsin lamba

13. inji regulator: sanyi cathode irin, don babban samfurin dakin; Rufi iri don gaba inji famfo

14.Sample Air kulle: Whisperlok zane, samfurin maye gurbin lokaci <1min, ba tare da karya samfurin dakin inji

Mai amfani dubawa:

15.10 inch taɓa allon: aiki mai sauki, da kuma iya cikakken shirye-shirye sarrafa duk sigogi don ingantaccen aiki.

16.Operation Mode: Musamman daban-daban aiki sigogi combination, cimma daya-maɓallin aiki.

Main aikace-aikace yankunan kayayyakin:

Shirya samfurin EBSD

Shirya Samfurin Sashe

Karfe kayan (gami, rufi)

Man fetur geological dutse ma'adanai

kayan lantarki

Chemical polymer kayan aiki

New makamashi baturi kayan

Electronic Semiconductor kayan aiki

PCB kewaye Edition sashe polishing SEM zane-zane

Galvanized karfe farantin sashe polishing

Zn hatsi

Fe hatsi